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MEMS 2D LASER SCANNING MIRROR
A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS
A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.
KEY FEATURES AND BENEFITS
- 2D single mirror– Minimizes optical engine size and increases optical efficiency
- Combination of electrostatic (H) and electromagnetic (V) actuators – Improves robustness and optimizes performance
- Wide optical FOV, up to 45° (H) & up to 30° (V) – Delivers large image/scan area
- High-sensitivity, dynamic closed control loops – Maintain stable peak performance even during changes in ambient conditions
- Static mirror alarm signal – Supports eye safety
- MEMS controller with standard digital video interface – Simplifies system design and integration
- Non-hermetic plastic package – Reduces cost
- Temperature Stability – A perfect image over a wide temperature range
Downloads
Data Sheet
Opto-mechanical Interface
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MEMS Mirrors Flexibility and Customization
Packaging
Maradin package can be fully adapted to the needs of different systems
- Plastics, ideal for low cost consumer applications of display and sensing
- Ceramics, could meet the requirements of the automotive market
Optical coating
Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.
- Laser Damage Threshold
- Custom laser wavelength coating using Bragg reflectors
- High reflectivity for UV (405nm), Visible (450~700), IR (800~1550) lasers
Connectivity
- Mardin’s MEMS Mirror can work with internal laser or synchronize to external laser
- MEMS could be Extended from the controller up to 50cm
- Synchronization of several mirrors together
- The sensing signals of the MEMS could serve as safety alarms
MAR1100.E MEMS 2D Scanning Mirrors Common Applications
Automotive
Automotive grade design, including a special hermetic packaging with advanced heat dissipation.
High stability for vibrations and temperature changesAR/VR Display
A low power design, with a non-uniform pixel distribution to form a proprietary foveated view. Extremely compact volume and packages options
Pico Projector
A flexible Picture Generating Unit (PGU) design with a verity of laser wavelengths and optical coating options
MAR1100.E – MEMS SCANNING MIRROR SPEC:
General
| Item | Specification |
|---|---|
| Optical angle (H x V) | Typ.: 45×20 Deg. | Max: 45×30 Deg. |
| Resolution (HxV) | Typ.: 1280×480 pixels | Max: 1280×600 pixels |
| Pixel position error | +/- 1/5 pixel |
| Resonance frequency (H) | 10,250 Hz |
| Resonance frequency (V) | 1800 Hz |
| Effective mirror size (H) | 1 mm |
| Effective mirror size (V) | 1.1 mm |
| MEMS Scanning Module dimensions (L x W x H) | Typ.: 12×6.5×5.9 mm | Small: 10×5.5×4.6 mm |
| MEMS Scanning module power consumption | 70 mW (rms) |
| Package | Typ.: Plastic, Non-Hermetic | Custom: Ceramic, Hermetic |
Optical
| Item | Specification |
|---|---|
| Throw Ratio | 1.2 |
| Incident angle (H) | 0 Deg. |
| Incident angle (V) | 15 – 22 Deg. |
| Mirror reflectance | Typ.: 90-93% (Aluminium coating) Max: 99.5% (High Reflective Coating) |
| Overall reflectance | 85% (Mirror & Optical window) |
| Wavelength range for reflection | Typ.: 440 -700 mm Custom: Any wavelength upon request |
| laser max spot size | 0.7 mm |
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MEMS Mirrors MAR1100.E in Numbers
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