MEMS 1D LASER SCANNING MIRROR
A 1D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS
The MAR1800 is a single axis vector scanning Mirror. MAR1800 Mirror supports large laser beam diameters (> 3mm), high deflection angles, multiple scan modes, all with very high accuracy and repeatability. The MAR1800 is designed for harsh environmental conditions, with high stiffness of the mirrors and innovative hermetic packaging. The MEMS mirrors utilize Maradin’s proprietary powerful electromagnetic actuator, which yields peak performance under varying conditions, along with a novel controller for accuracy and high performance.
Flexibility and Customization
Packaging
Optical coating
Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.
Scanning Patterns
MAR1800 S/L MEMS 1D Scanning Mirrors Common Applications
MAR1800S/L – MEMS SCANNING MIRROR SPEC:
General
| Parameter | Min | Typical Value | Max | Unit | Remarks |
|---|---|---|---|---|---|
Pixel position error | 1 | mRad | Both vertical and Horizontal | ||
Scan Frequency Range | 1 | 100 | 150 | Hz | |
Optical angle (HxV) | 20x10 | 20x20 | Deg. | HFOV x VHOV | |
V Mirror natural Frequency | 1.1 | 1.3 | 1.5 | KHz | |
H Mirror natural Frequency | 0.9 | 1 | 1.1 | KHz | |
Effective mirror size (V) | 3.6X4.7 | mm | |||
Effective mirror size (H) | 3.6X8.5 | mm | |||
MEMS Scanning module power consumption | <350 | mW | RMS for single mirror. Mirror deflection dependent |
Optical
| Parameter | Min | Typical Value | Max | Unit | Remarks |
|---|---|---|---|---|---|
Mirror flatness | 350 | 800 | nm | ||
Mirror reflectance | 90 | 99.5 | % | High Reflecting Coating upon request | |
Overall reflectance | 84 | 85 | 86 | % | Mirror and Optical window |
Wave length range for reflection | 440 | 9000 | nm | Optical window coating dependent | |
laser max spot size | 3 | mm | @1/e^2 | ||
Laser max Power | 2 | W |
